(?) (?)电(Dian)子(Zi)束(Shu)加(Jia)工(Gong)装(Zhuang)量(Liang)主(Zhu)要(Yao)由(You)电(Dian)子(Zi)枪(Qiang)系(Xi)统(Tong)、(?)真(Zhen)空(Kong)系(Xi)统(Tong)、(?)控(Kong)制(Zhi)系(Xi)统(Tong)和(He)电(Dian)源(Yuan)系(Xi)统(Tong)等(Deng)组(Zu)成(Cheng),如(Ru)图(Tu)67所(Suo)示(Shi)。(?)
(?) (?)电(Dian)子(Zi)枪(Qiang)用(Yong)来(Lai)发(Fa)射(She)高(Gao)速(Su)电(Dian)子(Zi)流(Liu),它(Ta)是(Shi)在(Zai)真(Zhen)空(Kong)条(Tiao)件(Jian)下(Xia),利(Li)用(Yong)电(Dian)流(Liu)加(Jia)热(Re)阴(Yin)极(Ji)1发(Fa)射(She)电(Dian)子(Zi)束(Shu),经(Jing)控(Kong)制(Zhi)栅(Zha)极(Ji)2初(Chu)步(Bu)聚(Ju)焦(Jiao)后(Hou),由(You)加(Jia)速(Su)阳(Yang)极(Ji)3加(Jia)速(Su)。(?)阴(Yin)极(Ji)可(Ke)用(Yong)纯(Chun)钨(Wu)、(?)钨(Wu)钽(Tan)、(?)硼(Peng)化(Hua)等(Deng)材(Cai)料(Liao)制(Zhi)成(Cheng)。(?)控(Kong)制(Zhi)栅(Zha)极(Ji)为(Wei)中(Zhong)间(Jian)有(You)孔(Kong)的(De)圆(Yuan)筒(Tong),在(Zai)其(Qi)上(Shang)加(Jia)比(Bi)阴(Yin)极(Ji)较(Jiao)负(Fu)的(De)偏(Pian)压(Ya),起(Qi)束(Shu)流(Liu)强(Qiang)度(Du)控(Kong)制(Zhi)和(He)初(Chu)步(Bu)聚(Ju)焦(Jiao)作(Zuo)用(Yong)。(?)在(Zai)加(Jia)速(Su)阳(Yang)极(Ji)上(Shang)加(Jia)比(Bi)阴(Yin)极(Ji)为(Wei)正(Zheng)的(De)高(Gao)压(Ya),起(Qi)吸(Xi)引(Yin)和(He)加(Jia)速(Su)电(Dian)子(Zi)流(Liu)的(De)作(Zuo)用(Yong)。(?)
(?) (?)真(Zhen)空(Kong)系(Xi)统(Tong)是(Shi)抽(Chou)真(Zhen)空(Kong),真(Zhen)空(Kong)度(Du)为(Wei)133×(?)(10-2~104)Pa,因(Yin)为(Wei)在(Zai)真(Zhen)空(Kong)中(Zhong)电(Dian)子(Zi)才(Cai)能(Neng)高(Gao)速(Su)运(Yun)动(Dong),发(Fa)射(She)阴(Yin)极(Ji)不(Bu)会(Hui)在(Zai)高(Gao)温(Wen)下(Xia)被(Bei)氧(Yang)化(Hua),同(Tong)时(Shi)也(Ye)防(Fang)止(Zhi)被(Bei)加(Jia)工(Gong)表(Biao)面(Mian)和(He)金(Jin)属(Shu)燕(Yan)气(Qi)氧(Yang)化(Hua)。(?)为(Wei)了(Liao)消(Xiao)除(Chu)加(Jia)工(Gong)时(Shi)金(Jin)属(Shu)蒸(Zheng)气(Qi)对(Dui)电(Dian)子(Zi)发(Fa)射(She)不(Bu)稳(Wen)定(Ding)的(De)影(Ying)响(Xiang),电(Dian)子(Zi)束(Shu)加(Jia)工(Gong)多(Duo)采(Cai)用(Yong)开(Kai)式(Shi)真(Zhen)空(Kong)系(Xi)统(Tong),即(Ji)不(Bu)断(Duan)地(Di)抽(Chou)出(Chu)加(Jia)工(Gong)中(Zhong)产(Chan)生(Sheng)的(De)金(Jin)属(Shu)蒸(Zheng)气(Qi)。(?)
(?) (?)控(Kong)制(Zhi)系(Xi)统(Tong)由(You)聚(Ju)焦(Jiao)装(Zhuang)置(Zhi)、(?)偏(Pian)转(Zhuan)装(Zhuang)量(Liang)和(He)工(Gong)作(Zuo)台(Tai)位(Wei)移(Yi)装(Zhuang)置(Zhi)等(Deng)组(Zu)成(Cheng),控(Kong)制(Zhi)电(Dian)子(Zi)束(Shu)束(Shu)斑(Ban)大(Da)小(Xiao)、(?)方(Fang)向(Xiang)和(He)工(Gong)件(Jian)位(Wei)移(Yi)。(?)
(?) (?)电(Dian)源(Yuan)系(Xi)统(Tong)提(Ti)供(Gong)稳(Wen)压(Ya)电(Dian)源(Yuan)、(?)各(Ge)种(Zhong)控(Kong)制(Zhi)电(Dian)压(Ya)及(Ji)加(Jia)速(Su)电(Dian)压(Ya)。(?)