(?) (?)光(Guang)刻(Ke)过(Guo)程(Cheng),其(Qi)主(Zhu)要(Yao)工(Gong)序(Xu)如(Ru)下(Xia)。(?)
(?) (?)1.涂(Tu)胶(Jiao)
(?) (?)把(Ba)光(Guang)致(Zhi)抗(Kang)蚀(Shi)剂(Ji)(俗(Su)称(Cheng)光(Guang)刻(Ke)胶(Jiao))涂(Tu)敷(Fu)在(Zai)半(Ban)导(Dao)体(Ti)基(Ji)片(Pian)的(De)氧(Yang)化(Hua)膜(Mo)上(Shang)的(De)过(Guo)程(Cheng)称(Cheng)为(Wei)涂(Tu)胶(Jiao)。(?)光(Guang)刻(Ke)胶(Jiao)可(Ke)分(Fen)为(Wei)正(Zheng)性(Xing)胶(Jiao)和(He)负(Fu)性(Xing)胶(Jiao),在(Zai)显(Xian)影(Ying)图(Tu)中(Zhong)被(Bei)光(Guang)照(Zhao)部(Bu)分(Fen)的(De)胶(Jiao)层(Ceng)被(Bei)去(Qu)除(Chu),形(Xing)成(Cheng)“窗(Chuang)口(Kou)”,为(Wei)负(Fu)性(Xing)胶(Jiao),反(Fan)之(Zhi)为(Wei)正(Zheng)性(Xing)胶(Jiao)。(?)涂(Tu)胶(Jiao)要(Yao)求(Qiu)薄(Bao)厚(Hou)均(Jun)匀(Yun),常(Chang)用(Yong)的(De)涂(Tu)胶(Jiao)方(Fang)法(Fa)有(You)旋(Xuan)转(Zhuan)(离(Li)心(Xin))甩(Shuai)涂(Tu)、(?)浸(Jin)渍(Zi)、(?)喷(Pen)涂(Tu)和(He)印(Yin)刷(Shua)等(Deng),有(You)专(Zhuan)门(Men)设(She)备(Bei)。(?)
(?) (?)2.曝(Pu)光(Guang)
(?) (?)利(Li)用(Yong)光(Guang)源(Yuan)发(Fa)出(Chu)的(De)光(Guang)束(Shu),经(Jing)工(Gong)作(Zuo)掩(Yan)膜(Mo)在(Zai)光(Guang)致(Zhi)抗(Kang)蚀(Shi)剂(Ji)涂(Tu)层(Ceng)成(Cheng)象(Xiang),即(Ji)为(Wei)曝(Pu)光(Guang)。(?)这(Zhe)种(Zhong)曝(Pu)光(Guang)称(Cheng)为(Wei)投(Tou)影(Ying)曝(Pu)光(Guang),又(You)称(Cheng)为(Wei)复(Fu)印(Yin)。(?)常(Chang)用(Yong)的(De)光(Guang)源(Yuan)有(You)电(Dian)子(Zi)束(Shu)、(?)X射(She)线(Xian)、(?)远(Yuan)紫(Zi)外(Wai)线(Xian)(准(Zhun)分(Fen)子(Zi)激(Ji)光(Guang))、(?)离(Li)子(Zi)束(Shu)等(Deng)。(?)从(Cong)投(Tou)影(Ying)方(Fang)式(Shi)上(Shang)可(Ke)分(Fen)为(Wei)接(Jie)触(Chu)式(Shi)、(?)接(Jie)近(Jin)式(Shi)反(Fan)射(She)式(Shi)等(Deng)。(?)上(Shang)述(Shu)的(De)原(Yuan)版(Ban)就(Jiu)是(Shi)用(Yong)于(Yu)投(Tou)影(Ying)曝(Pu)光(Guang)的(De)。(?)还(Huan)有(You)一(Yi)种(Zhong)曝(Pu)光(Guang)是(Shi)将(Jiang)光(Guang)束(Shu)聚(Ju)焦(Jiao)形(Xing)成(Cheng)细(Xi)小(Xiao)束(Shu)斑(Ban),通(Tong)过(Guo)数(Shu)控(Kong)扫(Sao)描(Miao),在(Zai)光(Guang)致(Zhi)抗(Kang)蚀(Shi)剂(Ji)涂(Tu)层(Ceng)上(Shang)绘(Hui)制(Zhi)图(Tu)形(Xing),称(Cheng)为(Wei)扫(Sao)描(Miao)曝(Pu)光(Guang),又(You)称(Cheng)为(Wei)写(Xie)图(Tu)。(?)这(Zhe)种(Zhong)曝(Pu)光(Guang)不(Bu)需(Xu)预(Yu)制(Zhi)工(Gong)作(Zuo)原(Yuan)版(Ban),但(Dan)要(Yao)设(She)计(Ji)编(Bian)制(Zhi)扫(Sao)描(Miao)轨(Gui)迹(Ji)程(Cheng)序(Xu)。(?)常(Chang)用(Yong)的(De)光(Guang)源(Yuan)有(You)电(Dian)子(Zi)束(Shu)、(?)离(Li)子(Zi)束(Shu)上(Shang)述(Shu)两(Liang)种(Zhong)曝(Pu)光(Guang)方(Fang)式(Shi)统(Tong)称(Cheng)为(Wei)哪(Na)光(Guang)
(?) (?)3.显(Xian)影(Ying)与(Yu)烘(Hong)片(Pian)
(?) (?)(1)显(Xian)影(Ying)曝(Pu)光(Guang)后(Hou)的(De)光(Guang)致(Zhi)抗(Kang)蚀(Shi)剂(Ji),其(Qi)分(Fen)子(Zi)结(Jie)构(Gou)产(Chan)生(Sheng)化(Hua)学(Xue)变(Bian)化(Hua),在(Zai)特(Te)定(Ding)溶(Rong)剂(Ji)或(Huo)水(Shui)中(Zhong)的(De)溶(Rong)解(Jie)度(Du)也(Ye)不(Bu)同(Tong),利(Li)用(Yong)曝(Pu)光(Guang)区(Qu)和(He)非(Fei)曝(Pu)光(Guang)区(Qu)的(De)这(Zhe)一(Yi)差(Cha)异(Yi),可(Ke)在(Zai)特(Te)定(Ding)溶(Rong)剂(Ji)中(Zhong)把(Ba)曝(Pu)光(Guang)图(Tu)形(Xing)呈(Cheng)现(Xian)出(Chu)来(Lai),这(Zhe)就(Jiu)是(Shi)显(Xian)影(Ying)。(?)
(?) (?)(2)烘(Hong)片(Pian)有(You)些(Xie)光(Guang)致(Zhi)抗(Kang)蚀(Shi)剂(Ji)在(Zai)显(Xian)影(Ying)干(Gan)燥(Zao)后(Hou),要(Yao)进(Jin)行(Xing)200℃(?)~250℃(?)的(De)高(Gao)温(Wen)处(Chu)理(Li),使(Shi)它(Ta)发(Fa)生(Sheng)热(Re)聚(Ju)合(He)作(Zuo)用(Yong),以(Yi)提(Ti)高(Gao)强(Qiang)度(Du),称(Cheng)为(Wei)烘(Hong)片(Pian)
(?) (?)4.刻(Ke)蚀(Shi)
(?) (?)利(Li)用(Yong)化(Hua)学(Xue)或(Huo)物(Wu)理(Li)方(Fang)法(Fa),将(Jiang)没(Mei)有(You)光(Guang)致(Zhi)抗(Kang)蚀(Shi)剂(Ji)部(Bu)分(Fen)的(De)氧(Yang)化(Hua)膜(Mo)去(Qu)除(Chu),称(Cheng)之(Zhi)为(Wei)刻(Ke)蚀(Shi)。(?)刻(Ke)蚀(Shi)的(De)方(Fang)法(Fa)很(Hen)多(Duo),有(You)化(Hua)学(Xue)刻(Ke)蚀(Shi)、(?)离(Li)子(Zi)刻(Ke)蚀(Shi)、(?)电(Dian)解(Jie)刻(Ke)蚀(Shi)等(Deng)
(?) (?)刻(Ke)蚀(Shi)不(Bu)仅(Jin)是(Shi)沿(Yan)厚(Hou)度(Du)方(Fang)向(Xiang),而(?)且(Qie)也(Ye)可(Ke)沿(Yan)横(Heng)向(Xiang)进(Jin)行(Xing),称(Cheng)之(Zhi)为(Wei)侧(Ce)面(Mian)刻(Ke)蚀(Shi)。(?)若(Ruo)以(Yi)表(Biao)示(Shi)侧(Ce)面(Mian)刻(Ke)蚀(Shi)量(Liang),以(Yi)h表(Biao)示(Shi)刻(Ke)蚀(Shi)深(Shen)度(Du),则(Ze)刻(Ke)蚀(Shi)系(Xi)数(Shu)=h/。(?)侧(Ce)面(Mian)刻(Ke)蚀(Shi)越(Yue)小(Xiao),刻(Ke)蚀(Shi)系(Xi)数(Shu)越(Yue)大(Da),制(Zhi)品(Pin)尺(Chi)寸(Cun)精(Jing)度(Du)就(Jiu)越(Yue)高(Gao),精(Jing)度(Du)稳(Wen)定(Ding)性(Xing)也(Ye)越(Yue)***。(?)由(You)于(Yu)有(You)侧(Ce)面(Mian)刻(Ke)蚀(Shi)现(Xian)象(Xiang),使(Shi)刻(Ke)蚀(Shi)成(Cheng)的(De)窗(Chuang)口(Kou)比(Bi)光(Guang)致(Zhi)抗(Kang)蚀(Shi)剂(Ji)窗(Chuang)口(Kou)大(Da)，(?)因(Yin)此(Ci)在(Zai)设(She)计(Ji)时(Shi)要(Yao)进(Jin)行(Xing)修(Xiu)正(Zheng)。(?)
(?) (?)5.剥(Bao)膜(Mo)与(Yu)检(Jian)查(Cha)
(?) (?)(1)剥(Bao)膜(Mo) (?)用(Yong)剥(Bao)膜(Mo)液(Ye)去(Qu)除(Chu)光(Guang)致(Zhi)搞(Gao)蚀(Shi)剂(Ji)的(De)处(Chu)理(Li)称(Cheng)为(Wei)剥(Bao)膜(Mo)。(?)
(?) (?)(2)检(Jian)查(Cha) (?)剥(Bao)膜(Mo)后(Hou)，(?)将(Jiang)工(Gong)件(Jian)洗(Xi)净(Jing)、(?)修(Xiu)整(Zheng)，(?)进(Jin)行(Xing)外(Wai)观(Guan)、(?)线(Xian)条(Tiao)尺(Chi)寸(Cun)、(?)间(Jian)隔(Ge)尺(Chi)寸(Cun)、(?)断(Duan)面(Mian)形(Xing)状(Zhuang)、(?)物(Wu)理(Li)性(Xing)能(Neng)、(?)电(Dian)学(Xue)性(Xing)能(Neng)等(Deng)质(Zhi)量(Liang)检(Jian)查(Cha)。(?)
